Proposal of a new structural thermal vacuum sensor with diode-thermistors combined with a micro-air-bridge heater-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Proposal of a new structural thermal vacuum sensor with diode-thermistors combined with a micro-air-bridge heater

Published:2007-02 Issue:2 Volume:38 Page:171-176
ISSN:0026-2692
Container-title:Microelectronics Journal
language:en
Short-container-title:Microelectronics Journal

Author:

Kimura Mitsuteru,Sakurai Fumitoshi,Ohta Hirao,Terada Tomoyuki

Publisher

Elsevier BV

Subject

General Engineering

Reference17 articles.

1. Microheater and microbolometer using microbridge of SiO2 film on silicon;Kimura;Electron. Lett.,1981

2. Micro Pirani pressure sensor for atmospheric pressure;Doms;Sensor 2005 Proc.,2005

3. A micro-Pirani vacuum gauge based on micro-hotplate technology;Zhang;Sensors and Actuators A: Physical,2006

4. The Nano Pirani—an extremely miniaturized pressure sensor fabricated by focused ion beam rapid prototyping;Puers;Sensors and Actuators A: Physical,2002

Cited by 31 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A combined MEMS thermal vacuum sensor with a wide pressure range;Journal of Micromechanics and Microengineering;2023-12-06

2. Charge Density-Based Pyroelectric Vacuum Sensor;Research;2023-01

3. Overview of the MEMS Pirani Sensors;Micromachines;2022-06-14

4. 1×3 reconfigurable and simultaneous three-mode selective router based on silicon waveguide utilizing Ti microheaters as thermo-optic phase shifters;Microelectronics Journal;2021-11

5. High-Performance Planar Thermal Diode With Wickless Components;Journal of Electronic Packaging;2021-09-15

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP