Piezoelectric characterization of Sc0.26Al0.74N layers on Si (001) substrates
Author:
Publisher
IOP Publishing
Subject
Metals and Alloys,Polymers and Plastics,Surfaces, Coatings and Films,Biomaterials,Electronic, Optical and Magnetic Materials
Link
http://iopscience.iop.org/article/10.1088/2053-1591/aab232/pdf
Reference48 articles.
1. Microstructure and mechanical properties of stress-tailored piezoelectric AlN thin films for electro-acoustic devices
2. SURFACE MORPHOLOGY OF SUBMICRON CRYSTALS IN ALUMINUM NITRIDE FILMS GROWN BY DC MAGNETRON SPUTTERING
3. The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films
4. Bandgap in Al1−xScxN
5. Thermal conductivity of aluminium nitride thin films prepared by reactive magnetron sputtering
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1. Low temperature sputtering deposition of Al1−xScxN thin films: Physical, chemical, and piezoelectric properties evolution by tuning the nitrogen flux in (Ar + N2) reactive atmosphere;Journal of Applied Physics;2024-03-26
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