The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films-Reference-Cited by-同舟云学术

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The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films

Published:2010-09 Issue:3 Volume:172 Page:253-258
ISSN:0921-5107
Container-title:Materials Science and Engineering: B
language:en
Short-container-title:Materials Science and Engineering: B

Author:

Ababneh A.,Schmid U.,Hernando J.,Sánchez-Rojas J.L.,Seidel H.

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference27 articles.

1. Piezoelectric, dielectric, and interfacial properties of aluminum nitride films

2. Proc. of the IEEE International Ultrasonics, Ferroelectrics, and Frequency Joint 50th Anniversary Conference;Kao,2004

3. Study of structural and microstructural properties of AlN films deposited on silicon and quartz substrates for surface acoustic wave devices

4. Compensation of parasitic effects for a silicon tuning fork gyroscope

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1. Compressive stress reduction in sputter-deposited yttrium aluminum nitride (Y0.2Al0.8N) thin films for BAW resonators with high electromechanical coupling;Sensors and Actuators A: Physical;2024-10

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4. A Machine Learning Study to Obtain an Optimal Processing Pulsed Frequency on Reactive Pulsed DC Sputtering of Aluminum Nitride Films;2024 Conference of Science and Technology for Integrated Circuits (CSTIC);2024-03-17

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