Deposition of TiN Films by Novel Filter Cathodic Arc Technique
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Reference16 articles.
1. Development of texture in TiN films deposited by filtered cathodic vacuum arc
2. Structure and mechanical properties of polycrystalline CrN/TiN superlattices
3. The effects of MEVVA ion implantation on the tribological properties of PVD-TiN films deposited on steel substrates
4. Chemical vapor deposition TiN process for contact/via barrier applications
5. Deposition of high‐quality TiN using tetra‐isopropoxide titanium in an electron cyclotron resonance plasma process
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Thermal stability and electrical properties of copper nitride with In or Ti;Chinese Physics B;2013-06
2. The Influence of Au-Doping on Morphology and Visible-Light Reflectivity of TiN Thin Films Deposited by Direct-Current Reactive Magnetron Sputtering;Chinese Physics Letters;2010-05
3. Effect of Silane Flow Rate on Structure and Corrosion Resistance of Ti–Si—N Thin Films Deposited by a Hybrid Cathodic Arc and Chemical Vapour Process;Chinese Physics Letters;2008-10-30
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