Effect of Silane Flow Rate on Structure and Corrosion Resistance of Ti–Si—N Thin Films Deposited by a Hybrid Cathodic Arc and Chemical Vapour Process
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/0256-307X/25/11/064/pdf
Reference19 articles.
1. A concept for the design of novel superhard coatings
2. Superhard nanocrystalline composite materials: The TiN/Si3N4 system
3. Oxidation and wear behaviors of Ti-based thin films
4. TiSiN nanocomposite coatings by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD)
5. Hard nanocomposite Ti–Si–N films prepared by DC reactive magnetron sputtering using Ti–Si mosaic target
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