Hard nanocomposite Ti–Si–N films prepared by DC reactive magnetron sputtering using Ti–Si mosaic target
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference13 articles.
1. Mechanical properties and machining performance of Ti1−xAlxN-coated cutting tools
2. Deposition of Ti–C–N coatings onto large-diameter tip saws
3. Structural and microtribological studies of Ti–C–N based nanocomposite coatings prepared by reactive sputtering
4. Structure, mechanical and tribological properties of Ti–B–N and Ti–Al–B–N multiphase thin films produced by electron-beam evaporation
5. Deposition of Ti–B–N films by ICP assisted sputtering
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1. Erosion Performance of TiAlSiN Coatings Prepared by High-Power Pulsed Magnetron Sputtering;Metals;2023-07-21
2. Recent developments in magnetron-sputtered silicon nitride coatings of improved mechanical and tribological properties for extreme situations;Journal of Materials Science;2023-06
3. Enhancement on the hardness and oxidation resistance property of TiN/Ag composite films for high temperature applications by addition of Si;Vacuum;2023-03
4. Application of Mosaic Cathodes Containing TiB (STIM-4) Segments for Deposition of Protective Coatings in the Ti–Al–Cr–B–N System by the Method of Closed Field Unbalanced Magnetron Sputtering;Protection of Metals and Physical Chemistry of Surfaces;2022-04
5. Microstructure and tribomechanical properties of multilayer TiZrN/TiSiN composite coatings with nanoscale architecture by cathodic-arc evaporation;Journal of Materials Science;2020-12-01
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