Recent developments in magnetron-sputtered silicon nitride coatings of improved mechanical and tribological properties for extreme situations
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Link
https://link.springer.com/content/pdf/10.1007/s10853-023-08575-4.pdf
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3. Filho LC, Schmidt S, López A et al (2019) The effect of coating density on functional properties of SiNx coated implants. Materials (Basel) 12:3370. https://doi.org/10.3390/ma12203370
4. Migliuolo M, Schlesinger TE (1998) Electro-optic thin films by magnetron sputtering. Nuovo Cim D 20:1209–1219. https://doi.org/10.1007/BF03185532
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