A Movable Mass Spectroscopy Sampling Apparatus for Measuring Spatial Distribution of Neutral Radicals in Silane Plasma
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Reference13 articles.
1. Recent understanding of the growth process of amorphous silicon from a silane glow-discharge plasma
2. Binding and surface diffusion of SiH3 radicals and the roughness of hydrogenated amorphous silicon
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5. Measurement of Absolute Densities and Spatial Distributions of Si and SiH in an RF-Discharge Silane Plasma for the Chemical Vapor Deposition of a-Si:H Films
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3. Reply to “Comment on ‘Effects of hydrogen dilution on the deposition process of nano-crystalline silicon film by SiCl4/H2 plasma’”;Journal of Physics D: Applied Physics;2007-04-19
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