MEMS gratings and their applications
Author:
Affiliation:
1. Department of Mechanical Engineering, Faculty of Engineering, National University of Singapore, Singapore, Singapore
Funder
Ministry of Education of Singapore
Publisher
Informa UK Limited
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Instrumentation
Link
https://www.tandfonline.com/doi/pdf/10.1080/15599612.2021.1892248
Reference158 articles.
1. MEMS Laser Scanners: A Review
2. 3D In Vivo optical coherence tomography based on a low-voltage, large-scan-range 2D MEMS mirror
3. An overview of optical phased array technology and status
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5. A review of MEMS external-cavity tunable lasers
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