Parallel in-Plane Electrothermal Actuators
Author:
Affiliation:
1. School of EE&T, UNSW Sydney, Kensington, NSW, Australia
2. Baraja Pty. Ltd., North Ryde, NSW, Australia
Funder
Baraja Pty. Ltd.
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Link
http://xplorestaging.ieee.org/ielx7/84/10547178/10493848.pdf?arnumber=10493848
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1. Scaling Limits of MEMS Beam-Steering Switches for Data Center Networks
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4. Large deflection micromechanical scanning mirrors for linear scans and pattern generation
5. MEMS optical phased array for LiDAR;Wang
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