Review of sensing and actuation technologies – from optical MEMS and nanophotonics to photonic nanosystems-Reference-Cited by-同舟云学术

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Review of sensing and actuation technologies – from optical MEMS and nanophotonics to photonic nanosystems

Published:2024-05-07 Issue:1 Volume:18 Page:
ISSN:1559-9612
Container-title:International Journal of Optomechatronics
language:en
Short-container-title:International Journal of Optomechatronics

Author:

Ma Yiming¹,Liu Weixin²³,Liu Xinmiao²³,Wang Nan¹,Zhang Hui⁴

Affiliation:

1. School of Microelectronics, Shanghai University, Shanghai, P. R. China

2. Department of Electrical and Computer Engineering, National University of Singapore, Singapore

3. Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore

4. Department of Electrical and Electronic Engineering, The Hong Kong Polytechnic University, Hong Kong, P. R. China

Funder

Ministry of Education (MOE) Singapore Academic Research Fund Tier 2

Advanced Research and Technology Innovation Centre

Hong Kong Polytechnic University Grant

Publisher

Informa UK Limited

Link

https://www.tandfonline.com/doi/pdf/10.1080/15599612.2024.2342279

Reference367 articles.

1. Internet of Things (IoT) for Next-Generation Smart Systems: A Review of Current Challenges, Future Trends and Prospects for Emerging 5G-IoT Scenarios

2. Piezoelectric MEMS—evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era

3. From flexible electronics technology in the era of IoT and artificial intelligence toward future implanted body sensor networks

4. Development Trends and Perspectives of Future Sensors and MEMS/NEMS

5. Recent Progress in Silicon‐Based Photonic Integrated Circuits and Emerging Applications

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