Production of radiation defects in silicon at different temperatures

Author:

Glaser E.,Götz G.,Wesch W.,Frey H.

Publisher

Informa UK Limited

Subject

General Engineering

Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Damage evolution and amorphization in semiconductors under ion irradiation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2012-04

2. Temperature Dependence of Ion-Beam-Induced In-Plane Stress in Silicon;MRS Proceedings;1992

3. Optical Effects of High Energy Implantations in Semiconductors;physica status solidi (b);1989-05-01

4. Residual disorder in silicon after anneal of high dose through oxide arsenic implants;Nuclear Instruments and Methods in Physics Research;1983-05

5. Radiation damage and near edge optical properties of nitrogen implanted gallium arsenide;physica status solidi (a);1982-03-16

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