Quantitative determination of oxygen in silicon by combination of FTIR-spectroscopy, inert gas fusion analysis and secondary ion mass spectroscopy

Author:

Stingeder G.,Gara S.,Pahlke S.,Schwenk H.,Guerrero E.,Grasserbauer M.

Publisher

Springer Science and Business Media LLC

Subject

Clinical Biochemistry,General Materials Science,General Medicine,Analytical Chemistry

Reference39 articles.

1. Zulehner W, Huber D (1982) In: Grabmaier D (ed) Crystals: growth, properties and applications, vol 8. Springer, Berlin Heidelberg New York, p 1

2. Keller W, Mühlbauer A (1981) In: Wilcox WR (ed) Floating zone silicon, preparation and properties of solid state materials. Dekker, New York

3. Craven RA (1985) In: Fair RB, Pearce CW, Washburn J (eds) Impurity diffusion and gettering in silicon. MRS-Symp 36:159

4. Borland JO, Deacon T (1984) Solid State Technol 27:123

5. Tsuya H, Kondo Y, Kanamori M (1983) Jpn J Appl Phys 22:L116

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