Characteristic Study of Silicon Nitride Films Deposited by LPCVD and PECVD
Author:
Publisher
Springer Science and Business Media LLC
Subject
Electronic, Optical and Magnetic Materials
Link
http://link.springer.com/article/10.1007/s12633-018-9791-6/fulltext.html
Reference18 articles.
1. Nix WD (1989) Mechanical properties of thin films. Metall Trans A 20:2217–2245
2. Dharmadhikari VS (1987) Characterization of plasma-deposited silicon nitride coating used for integrated circuit encapsulation. Thin Solid Films 153:459–468
3. Habraken FHPM, Kuiper AET (1994) Silicon nitride and oxynitride films. Mater Sci Eng R12:123–175
4. Scardera G, Puzzer T, Conibeer G, Green MA (2008) Fourier transform infrared spectroscopy of annealed silicon-rich silicon nitride thin films. J Appl Phys 104:104310. https://doi.org/10.1063/1.3021158
5. Rohatgi A, Yelundur V, Jeong J, Ebong A, Rosenblum MD, Hanoka JI (2002) Fundamental understanding and implementation of Al-enhanced PECVD SiNx hydrogenation in silicon ribbons. Sol Energy Mater Sol Cells 74:117–126
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