Silicon nitride and oxynitride films
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Reference271 articles.
1. Plasma Si nitride—A promising dielectric to achieve high‐quality silicon MIS/IL solar cells
2. Plasma-enhanced CVD silicon nitride antireflection coatings for solar cells
3. High efficiency MIS/IL silicon solar cells with silicon oxynitride as ultra-thin tunneling films
4. Formation of Silicon Nitride at a Si ‐ SiO2 Interface during Local Oxidation of Silicon and during Heat‐Treatment of Oxidized Silicon in NH 3 Gas
5. ONO technology
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