Sensorless control for hysteresis compensation of AFM scanner by modified Rayleigh model
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Link
http://link.springer.com/content/pdf/10.1007/s11771-010-0626-x.pdf
Reference13 articles.
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4. YI K A, VEILLETTE R J. A charge controller for linear operation of a piezoelectric stack actuator [J]. IEEE Transactions on Control System Technology, 2005, 13: 517–526.
5. SCHITTER G, STEMMER A. Model-based signal conditioning for high-speed atomic force and friction force microscopy [J]. Microelectronic Engineering, 2003, 67: 938–944.
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