Creep, Hysteresis, and Vibration Compensation for Piezoactuators: Atomic Force Microscopy Application
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Published:1999-11-19
Issue:1
Volume:123
Page:35-43
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ISSN:0022-0434
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Container-title:Journal of Dynamic Systems, Measurement, and Control
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language:en
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Short-container-title:
Author:
Croft D.1, Shed G.2, Devasia S.3
Affiliation:
1. Department of Mechanical Engineering, 50 S. Central Campus Dr., MEB 3201, University of Utah, Salt Lake City, UT 84112-9208 2. Burleigh Instruments Inc., Fishers, NY 14453 3. Department of Mechanical Engineering, University of Washington, Seattle, WA 98195-2600
Abstract
This article studies ultra-high-precision positioning with piezoactuators and illustrates the results with an example Scanning Probe Microscopy (SPM) application. Loss of positioning precision in piezoactuators occurs (1) due to hysteresis during long range applications, (2) due to creep effects when positioning is needed over extended periods of time, and (3) due to induced vibrations during high-speed positioning. This loss in precision restricts the use of piezoactuators in high-speed positioning applications like SPM-based nanofabrication, and ultra-high-precision optical systems. An integrated inversion-based approach is presented in this article to compensate for all three adverse affects—creep, hysteresis, and vibrations. The method is applied to an Atomic Force Microscope (AFM) and experimental results are presented that demonstrate substantial improvements in positioning precision and operating speed.
Publisher
ASME International
Subject
Computer Science Applications,Mechanical Engineering,Instrumentation,Information Systems,Control and Systems Engineering
Reference27 articles.
1. Choi, S., Cho, S., and Park, Y., 1999, “Vibration and position tracking control of piezoceramic-based smart structures via qft,” ASME J. Dyn. Syst., Meas., Control, 121, pp. 27–33. 2. Wiesendanger, R., 1994, Scanning Probe Microscopy and Spectroscopy, Cambridge University Press, Cambridge, UK. 3. Barrett, R.
, 1994, “Active plate and missile wing development using directionally attached piezoelectric elements,” AIAA J., 32, No. 3, Mar., pp. 601–609. 4. Ge, P., and Jouaneh, M., 1996, “Tracking control of a piezoceramic actuator,” IEEE Trans. Control Syst. Technol., 4, No. 3, pp. 209–216. 5. Robinson, R. S.
, 1996, “Interactive computer correction of piezoelectric creep in scanning tunneling microscopy images,” J. Comput.-Assist. Microsc., 2, No. 1, pp. 53–58.
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