Displacement control of piezoelectric element by feedback of induced charge

Author:

Furutani Katsushi,Urushibata Mitsunori,Mohri Naotake

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science,General Chemistry,Bioengineering

Cited by 76 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

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2. Evaluation of Temperature Dependency for Displacement Estimation in Piezoelectric Stack Actuators;2022 IEEE 17th International Conference on Advanced Motion Control (AMC);2022-02-18

3. HS-AFM System and Optimized Instrumental Components;High-Speed Atomic Force Microscopy in Biology;2022

4. Displacement Estimation and Control Based on High Frequency Injection and Bridge Circuit in Piezoelectric Actuators;IECON 2020 The 46th Annual Conference of the IEEE Industrial Electronics Society;2020-10-18

5. Contact Force Control Based on Force Estimation in Bimorph-type Piezoelectric Actuators;2020 IEEE 16th International Workshop on Advanced Motion Control (AMC);2020-09-14

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