Modelling the Oxide and the Oxidation Process
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Publisher
Springer Netherlands
Link
http://link.springer.com/content/pdf/10.1007/978-94-011-5008-8_6
Reference30 articles.
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4. Torres, V.J.B., Stoneham, AM., Sofield, C.J., Harker, AH., and Clement, C.F., (1995), Early stages of silicon oxidation, Interface Science 3 131–144.
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Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Atomic transport during growth of ultrathin dielectrics on silicon;Surface Science Reports;1999-12
2. Dynamics of Silicon Oxidation;MRS Proceedings;1999
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