Architectures of Translational Parallel Mechanism for MEMS Fabrication

Abstract

Manufacturing techniques, especially in the microscale, determine the type of joints, links, and actuators available for the designer, and as a result, the possible kinematic architectures of the designed mechanism. This paper discusses the design constraints imposed by current microelectromechanical system (MEMS) fabrication techniques, and how they affect the feasible kinematic architectures of microrobots. In particular, three degree-of-freedom translational mechanisms are investigated, and all possible nonoverconstrained kinematic architectures under limitations imposed by MEMS fabrication techniques are derived.