Design of Two-Link, In-Plane, Bistable Compliant Micro-Mechanisms
Author:
Jensen B. D.1, Howell L. L.1, Salmon L. G.2
Affiliation:
1. Mechanical Engineering Department, Brigham Young University, Provo, Utah 84602 2. Integrated Microelectronics Laboratory, Electrical and Computer Engineering Department, Brigham Young University, Provo, Utah 84602
Abstract
A bistable mechanism has two stable states within its range of motion. Its advantages include the ability to stay in two positions without power input and despite small external disturbances. Therefore, bistable micro-mechanisms could allow the creation of MEMS with improved energy efficiency and positioning accuracy. This paper presents bistable micro-mechanisms which function within the plane of fabrication. These bistable mechanisms, called “Young” bistable mechanisms, obtain their energy storage characteristics from the deflection of two compliant members. They have two pin joints connected to the substrate, and can be constructed of two layers of polysilicon. The pseudo-rigid-body model is used to analyze and design these mechanisms. This approach allows greater freedom and flexibility in the design process. The mechanisms were fabricated and tested to demonstrate their bistable behavior and to determine the repeatability of their stable positions.
Publisher
ASME International
Subject
Computer Graphics and Computer-Aided Design,Computer Science Applications,Mechanical Engineering,Mechanics of Materials
Reference28 articles.
1. Ananthasuresh, G. K., and Kota, S., 1996, “The Role of Compliance in the Design of MEMS,” Proceedings of the 1996 ASME Design Engineering Technical Conferences, 96-DETC/MECH-1309. 2. Bisshopp K. E. , and DruckerD. C., 1945, “Large Deflection of Cantilever Beams,” Quarterly of Applied Mathematics, Vol. 3, No. 3, pp. 272–275. 3. Comtois J. H. , and BrightV. M., 1995, “Design Techniques for Surface-Micromachining MEMS Processes,” SPIE, Vol. 2639, pp. 211–222. 4. Derderian, J. M., Howell, L. L., Murphy, M. D., Lyon, S. M., and Pack, S. D., 1996, “Compliant Parallel-Guiding Mechanisms,” Proceedings of the 1996 ASME Design Engineering Technical Conferences, 96-DETC/MECH-1208. 5. Erdman, A. G., and Sandor, G. N., 1997, Mechanism Design: Analysis and Synthesis, Vol. 1, 3rd Ed., Prentice Hall, New Jersey.
Cited by
92 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
|
|