Design of Two-Link, In-Plane, Bistable Compliant Micro-Mechanisms-Reference-Cited by-同舟云学术

Design of Two-Link, In-Plane, Bistable Compliant Micro-Mechanisms

Published:1999-09-01 Issue:3 Volume:121 Page:416-423
ISSN:1050-0472
Container-title:Journal of Mechanical Design
language:en
Short-container-title:

Author:

Jensen B. D.¹,Howell L. L.¹,Salmon L. G.²

Affiliation:

1. Mechanical Engineering Department, Brigham Young University, Provo, Utah 84602

2. Integrated Microelectronics Laboratory, Electrical and Computer Engineering Department, Brigham Young University, Provo, Utah 84602

Abstract

A bistable mechanism has two stable states within its range of motion. Its advantages include the ability to stay in two positions without power input and despite small external disturbances. Therefore, bistable micro-mechanisms could allow the creation of MEMS with improved energy efficiency and positioning accuracy. This paper presents bistable micro-mechanisms which function within the plane of fabrication. These bistable mechanisms, called “Young” bistable mechanisms, obtain their energy storage characteristics from the deflection of two compliant members. They have two pin joints connected to the substrate, and can be constructed of two layers of polysilicon. The pseudo-rigid-body model is used to analyze and design these mechanisms. This approach allows greater freedom and flexibility in the design process. The mechanisms were fabricated and tested to demonstrate their bistable behavior and to determine the repeatability of their stable positions.

Publisher

ASME International

Subject

Computer Graphics and Computer-Aided Design,Computer Science Applications,Mechanical Engineering,Mechanics of Materials

Link

http://asmedigitalcollection.asme.org/mechanicaldesign/article-pdf/121/3/416/5921087/416_1.pdf

Reference28 articles.

1. Ananthasuresh, G. K., and Kota, S., 1996, “The Role of Compliance in the Design of MEMS,” Proceedings of the 1996 ASME Design Engineering Technical Conferences, 96-DETC/MECH-1309.

2. Bisshopp K. E. , and DruckerD. C., 1945, “Large Deflection of Cantilever Beams,” Quarterly of Applied Mathematics, Vol. 3, No. 3, pp. 272–275.

3. Comtois J. H. , and BrightV. M., 1995, “Design Techniques for Surface-Micromachining MEMS Processes,” SPIE, Vol. 2639, pp. 211–222.

4. Derderian, J. M., Howell, L. L., Murphy, M. D., Lyon, S. M., and Pack, S. D., 1996, “Compliant Parallel-Guiding Mechanisms,” Proceedings of the 1996 ASME Design Engineering Technical Conferences, 96-DETC/MECH-1208.

5. Erdman, A. G., and Sandor, G. N., 1997, Mechanism Design: Analysis and Synthesis, Vol. 1, 3rd Ed., Prentice Hall, New Jersey.

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