Affiliation:
1. Massachusetts Institute of technology
2. The University of Michigan
Abstract
Abstract
A great majority of the available micro devices and systems use compliant (or flexible) structures and mechanisms. This trend in design takes advantage of micromachining techniques while satisfying the constraints imposed by them. By citing relevant literature, this article briefly notes the influence of compliance on the mechanical design and analysis of Micro-Electro-Mechanical Systems (MEMS).
Publisher
American Society of Mechanical Engineers
Cited by
3 articles.
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