Author:
Comtois John H.,Bright Victor M.
Cited by
12 articles.
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1. Optimized design for an electrothermal microactuator;Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VII;2015-02-21
2. Disc type thermal actuator with straight beams for angular motion;Applied Thermal Engineering;2013-03
3. Self-sacrificial surface micromachining using poly(methyl methacrylate);Journal of Micromechanics and Microengineering;2008-09-26
4. Design and fabrication of micromirror for MOEMS devices by CMOS-MEMS common process;MEMS/MOEMS Components and Their Applications II;2005-01-22
5. Non-Ideal Processes;An Introduction to Surface-Micromachining;2004