Disc type thermal actuator with straight beams for angular motion-Reference-Cited by-同舟云学术

Disc type thermal actuator with straight beams for angular motion

Published:2013-03 Issue:1-2 Volume:51 Page:988-999
ISSN:1359-4311
Container-title:Applied Thermal Engineering
language:en
Short-container-title:Applied Thermal Engineering

Author:

Anwar M. Arefin,Packirisamy Muthukumaran,Ahmed A.K. Waiz

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Energy Engineering and Power Technology

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4. J.H. Comtois, V.M. Bright, ‘Surface Micromachined Polysilicon Thermal Actuator Arrays and Applications’, 1990, Technical Digest, Solid State Sensor and Actuator workshop, Hilton Head, SC, pp. 174–177.

5. Design techniques for surface-micromachining MEMS processes;Comtois;Proceeding of SPIE,1995

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