Flattening of Si (001) Surface by EEM (Elastic Emission Machining)
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Japan Society for Precision Engineering
Reference29 articles.
1. First-Principles Study of Oxide Growth on Si(100) Surfaces and atSiO2/Si(100) Interfaces
2. Scanning tunneling microscopy of silicon surfaces in air: Observation of atomic images
3. The formation of hydrogen passivated silicon single‐crystal surfaces using ultraviolet cleaning and HF etching
4. Atomic structures of hydrogen-terminated Si(001) surfaces after wet cleaning by scanning tunneling microscopy
5. Atomically resolved scanning tunneling microscopy of hydrogen-terminated Si(001) surfaces after HF cleaning
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Machining Property in Smoothing of Steeply Curved Surfaces by Elastic Emission Machining;Procedia CIRP;2014
2. Development of nanometer level accurate computer-controlled figuring with high spatial resolution and its application to hard X-ray focusing mirror;Journal of the Japan Society for Precision Engineering;2010
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