"Hole-in-One TSV", a New Via Last Concept for High Density 3D-SOC Interconnects

Author:

De Vos Joeri,Van Huylenbroeck Stefaan,Jourdain Anne,Heylen Nancy,Peng Lan,Jamieson Geraldine,Tutunjyan Nina,Sardo Stefano,Miller Andy,Beyne Eric

Publisher

IEEE

Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. An Equivalent Circuit Model for Elliptic Cylindrical TSV Considering the Temperature Influence;2024 2nd International Symposium of Electronics Design Automation (ISEDA);2024-05-10

2. Detection of bonding voids for 3D integration;Metrology, Inspection, and Process Control XXXVII;2023-04-27

3. The design and optimization of novel elliptic cylindrical through‐silicon via and its temperature characterization;Engineering Reports;2022-02-23

4. Power Delivery and Thermal-Aware Arm-Based Multi-Tier 3D Architecture;2021 IEEE/ACM International Symposium on Low Power Electronics and Design (ISLPED);2021-07-26

5. PI/SI consideration for enabling 3D IC design;2021 IEEE 71st Electronic Components and Technology Conference (ECTC);2021-06

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