A Large-Stroke Tip-Tilt-Piston Micromirror with Electromagnetic Actuators Based on Metallic Glass-Reference-Cited by-同舟云学术

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A Large-Stroke Tip-Tilt-Piston Micromirror with Electromagnetic Actuators Based on Metallic Glass

Published:2023-01-15 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
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Author:

Ou Chuan-Hui¹,Toan Nguyen V.¹,Ono Takahito¹

Affiliation:

1. Tohoku University,Japan

Funder

Tohoku University

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10052111/10052113/10052335.pdf?arnumber=10052335

Reference10 articles.

1. Large Tilt Angle Lorentz Force Actuated Micro-Mirror with 3 DOF for Optical Applications

2. Metallic glass thin film integrated with flexible membrane for electromagnetic micropump application

3. Shaping metallic glasses by electromagnetic pulsing

4. Micro-fabricated pressure sensor using 50 nm-thick of pd-based metallic glass freestanding membrane;van toan;Scientific Reports,2020

5. FR4 Electromagnetic Scanner Based Fourier Transform Spectrometer

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Large-Stroke 3-DOF Micromirror With Novel Lorentz Force-Based Actuators Utilizing Metallic Glass Thin Film;Journal of Microelectromechanical Systems;2024-02

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