FR4 Electromagnetic Scanner Based Fourier Transform Spectrometer

Author:

Baran Utku1,Hedili Kivanc1,Olcer Selim1,Urey Hakan1

Affiliation:

1. Koc¸ University, Istanbul, Turkey

Abstract

Fourier transform spectrometers require an interferometric optical setup, where a precisely controlled motion of a mirror on a moving stage and a reference mirror are required. FR4, a common printed circuit board substrate, and the standard PCB technology is used to develop a simple gimbaled scanner structure with high precision to implement into a low-cost and viable Fourier Transform Spectrometer. On top of the corner cube reflector based tilt-insensitive setup, magnetic actuation optimization using twin opposing magnets solution is found to be helpful to enhance interference data. Large Lorentz force is generated for out-of-plane deflection while the torsional motion of the scanner is restricted. ±162.8um out-of-plane translation at 149 Hz resonance is realized with torsion effect deteriorated result which corresponds to <1nm spectral resolution at visible wavelengths.

Publisher

ASMEDC

Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. A Large-Stroke Tip-Tilt-Piston Micromirror with Electromagnetic Actuators Based on Metallic Glass;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15

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