A Large-Stroke 3-DOF Micromirror With Novel Lorentz Force-Based Actuators Utilizing Metallic Glass Thin Film-Reference-Cited by-同舟云学术

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A Large-Stroke 3-DOF Micromirror With Novel Lorentz Force-Based Actuators Utilizing Metallic Glass Thin Film

Published:2024-02 Issue:1 Volume:33 Page:46-53
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Ou Chuan-Hui¹^ORCID,Van Toan Nguyen¹,Tsai Yao-Chuan²^ORCID,Voiculescu Ioana³,Toda Masaya¹,Ono Takahito⁴^ORCID

Affiliation:

1. Department of Mechanical Systems Engineering, Tohoku University, Sendai, Japan

2. Department of Bio-Industrial Mechatronics Engineering, National Chung Hsing University, Taichung City, Taiwan

3. Department of Mechanical Engineering, The City College of New York, New York, NY, USA

4. Department of Mechanical Systems Engineering, Micro System Integration Center, Tohoku University, Sendai, Japan

Funder

Micro/Nanomachining Research Education Center (MNC), Tohoku University

Micro System Integration Center (μSiC), Tohoku University

Japan Science and Technology Agency

Pioneering Research Initiated

Next Generation

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/10419084/10347253.pdf?arnumber=10347253

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