Large Tilt Angle Lorentz Force Actuated Micro-Mirror with 3 DOF for Optical Applications-Reference-Cited by-同舟云学术

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Large Tilt Angle Lorentz Force Actuated Micro-Mirror with 3 DOF for Optical Applications

Published:2017-08-08 Issue:4 Volume:1 Page:351
ISSN:2504-3900
Container-title:Proceedings
language:en
Short-container-title:Proceedings

Author:

Afsharipour Elnaz,Park Byoungyoul^ORCID,Shafai Cyrus

Publisher

MDPI AG

Subject

General Medicine

Link

http://www.mdpi.com/2504-3900/1/4/351/pdf

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Large-Stroke Tip-Tilt-Piston Micromirror with Electromagnetic Actuators Based on Metallic Glass;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15

2. Low-power three-degree-of-freedom Lorentz force microelectromechanical system mirror for optical applications;Journal of Micro/Nanolithography, MEMS, and MOEMS;2019-01-14

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