High-SPL and Low-Driving-Voltage pMUTs by Sputtered Potassium Sodium Niobate
Author:
Affiliation:
1. Berkeley Sensor and Actuator Center,Berkeley,CA,USA
2. University of California,Department of Mechanical Engineering,Berkeley,CA,USA
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10052111/10052113/10052391.pdf?arnumber=10052391
Reference16 articles.
1. KNN lead-free piezoelectric films grown by sputtering
2. Air-coupled PMUT at 100 kHz with PZT active layer and residual stresses: Multiphysics model and experimental validation
3. Air-coupled PMUTs array with residual stresses: experimental tests in the linear and non-linear dynamic regime
4. An Improved Lumped Element Model for Circular-Shape pMUTs
5. High-Pressure Output 40 kHz Air-Coupled Piezoelectric Micromachined Ultrasonic Transducers
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2. Design, Fabrication, and Characterization of High-Performance PMUT Arrays Based on Potassium Sodium Niobate;Journal of Microelectromechanical Systems;2024-08
3. Characterization and Optimization of PZT-Based PMUTs With Wide Range Frequency Tuning;Journal of Microelectromechanical Systems;2024-08
4. Broadband and High-Pressure Output PMUT Array Based on Lead-Free KNN Thin Film;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21
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