Broadband and High-Pressure Output PMUT Array Based on Lead-Free KNN Thin Film-Reference-Cited by-同舟云学术

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Broadband and High-Pressure Output PMUT Array Based on Lead-Free KNN Thin Film

Published:2024-01-21 Issue: Volume: Page:
ISSN:
Container-title:2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
language:
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Author:

Zhao Lei¹,Yang Chong¹,Zhang Xinyue¹,You Zhiwei¹,Lu Yipeng¹

Affiliation:

1. Peking University,School of Integrated Circuits,China

Funder

Kyoto University

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10439241/10439292/10439309.pdf?arnumber=10439309

Reference10 articles.

1. Novel Phased Array Piezoelectric Micromachined Ultrasound Transducers (pMUTs) for Medical Imaging

2. 12.1 3D ultrasonic gesture recognition

3. Ultrasonic fingerprint sensor using a piezoelectric micromachined ultrasonic transducer array integrated with complementary metal oxide semiconductor electronics

4. High-SPL Air-Coupled Piezoelectric Micromachined Ultrasonic Transducers Based on 36% ScAlN Thin-Film

5. High-SPL and Low-Driving-Voltage pMUTs by Sputtered Potassium Sodium Niobate

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Modeling and experimental studies of mutual acoustic radiation effect on PMUT array;Sensors and Actuators A: Physical;2024-10

2. Design, Fabrication, and Characterization of High-Performance PMUT Arrays Based on Potassium Sodium Niobate;Journal of Microelectromechanical Systems;2024-08

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