Ultrasonic fingerprint sensor using a piezoelectric micromachined ultrasonic transducer array integrated with complementary metal oxide semiconductor electronics

Author:

Lu Y.1,Tang H.2,Fung S.1,Wang Q.1,Tsai J. M.3,Daneman M.3,Boser B. E.2,Horsley D. A.1ORCID

Affiliation:

1. Berkeley Sensor and Actuator Center, University of California, Davis, 1 Shields Avenue, Davis, California 95616, USA

2. Berkeley Sensor and Actuator Center, University of California, Berkeley, California 94720, USA

3. InvenSense, Inc., 1745 Technology Drive, San Jose, California 95110, USA

Funder

Berkeley Sensor and Actuator Center

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Reference16 articles.

1. S. Memon , M. Sepasian , and W. Balachandran , in International Multitopic Conference (2008), p. 226.

2. A 600-dpi capacitive fingerprint sensor chip and image-synthesis technique

3. Design and implementation of a capacitive fingerprint sensor circuit in CMOS technology

4. J. K. Schneider and S. M. Gojevic , in IEEE Ultrasonics Symposium (IUS) (2001), p. 595.

5. A high frequency cMUT probe for ultrasound imaging of fingerprints

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