Air-coupled PMUTs array with residual stresses: experimental tests in the linear and non-linear dynamic regime-Reference-Cited by-同舟云学术

Air-coupled PMUTs array with residual stresses: experimental tests in the linear and non-linear dynamic regime

Published:2020-10-01 Issue:4 Volume:11 Page:387-399
ISSN:1947-5411
Container-title:International Journal of Smart and Nano Materials
language:en
Short-container-title:International Journal of Smart and Nano Materials

Author:

Massimino Gianluca¹^ORCID,Lazarova Borka¹,Quaglia Fabio²,Corigliano Alberto¹

Affiliation:

1. Department of Civil and Environmental Engineering Politecnico Di Milano, Milan, Italy

2. Analog, MEMS & Sensors Group STMicroelectronics, Cornaredo, Italy

Funder

ECSEL JOINT UNDERTAKING

Publisher

Informa UK Limited

Subject

General Materials Science,Civil and Structural Engineering,Mechanics of Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/19475411.2020.1834003

Reference16 articles.

1. Multiphysics modelling and experimental validation of an air-coupled array of PMUTs with residual stresses

2. Modeling, Fabrication, and Characterization of Piezoelectric Micromachined Ultrasonic Transducer Arrays Based on Cavity SOI Wafers

3. AlN-on-Si Square Diaphragm Piezoelectric Micromachined Ultrasonic Transducer with Extended Range of Detection

4. Ultrasonic fingerprint sensor using a piezoelectric micromachined ultrasonic transducer array integrated with complementary metal oxide semiconductor electronics

5. High electromechanical coupling piezoelectric micro-machined ultrasonic transducer (PMUT) elements for medical imaging

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