Multiphysics modelling and experimental validation of an air-coupled array of PMUTs with residual stresses-Reference-Cited by-同舟云学术

Multiphysics modelling and experimental validation of an air-coupled array of PMUTs with residual stresses

Published:2018-03-14 Issue:5 Volume:28 Page:054005
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Massimino G,Colombo A,D’Alessandro L,Procopio F,Ardito R,Ferrera M,Corigliano A^ORCID

Funder

Eniac-Ecsel

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://iopscience.iop.org/article/10.1088/1361-6439/aaaf78/pdf

Reference17 articles.

1. Mechanics of Microsystems

2. Thin Film Piezoelectrics for MEMS

3. On the application of piezolaminated composites to diaphragm micropumps

4. A piezoelectric vibration based generator for wireless electronics

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