Air-coupled PMUT at 100 kHz with PZT active layer and residual stresses: Multiphysics model and experimental validation

Author:

Massimino G.,D'Alessandro L.,Procopio F.,Ardito R.,Ferrera M.,Corigliano A.

Publisher

IEEE

Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Large Area Flexible Triaxial Force Sensor Array;2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE);2024-04-07

2. Numerical Simulation of Crosstalk Effects in PMUT Arrays;2023 24th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE);2023-04-17

3. PMUTs Arrays for Structural Health Monitoring of Bolted-Joints;Micromachines;2023-01-25

4. High-SPL and Low-Driving-Voltage pMUTs by Sputtered Potassium Sodium Niobate;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15

5. Modeling, Identification and Operation of Air-Coupled PMUTs in Non-Linear Regime;2022 IEEE International Ultrasonics Symposium (IUS);2022-10-10

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