A Large-Stroke Reluctance-Actuated Nanopositioner: Compliant Compensator for Enhanced Linearity and Precision Motion Control
Author:
Affiliation:
1. State Key Laboratory of Tribology in Advanced Equipment, Department of Mechanical Engineering, Tsinghua University, Beijing, China
2. NT-MDT Spectrum Instruments China office, Beijing, China
Funder
National Natural Science Foundation of China
State Key Laboratory of Tribology in Advanced Equipment
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Link
http://xplorestaging.ieee.org/ielx8/3516/10637783/10559659.pdf?arnumber=10559659
Reference41 articles.
1. A Review of Feedforward Control Approaches in Nanopositioning for High-Speed SPM
2. Invited Review Article: High-speed flexure-guided nanopositioning: Mechanical design and control issues
3. Large-range high-speed dynamic-mode atomic force microscope imaging: adaptive tapping towards minimal force
4. Ultra-precision engineering in lithographic exposure equipment for the semiconductor industry
5. A Laser Scanner–Stage Synchronized System Supporting the Large-Area Precision Polishing of Additive-Manufactured Metallic Surfaces
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