A Review of Feedforward Control Approaches in Nanopositioning for High-Speed SPM-Reference-Cited by-同舟云学术

A Review of Feedforward Control Approaches in Nanopositioning for High-Speed SPM

Published:2009-10-28 Issue:6 Volume:131 Page:
ISSN:0022-0434
Container-title:Journal of Dynamic Systems, Measurement, and Control
language:en
Short-container-title:

Author:

Clayton Garrett M.¹,Tien Szuchi²,Leang Kam K.³,Zou Qingze⁴,Devasia Santosh⁵

Affiliation:

1. Department of Mechanical Engineering, Villanova University, Villanova, PA 19085

2. Department of Mechanical Engineering, National Cheng Kung University, Tainan 701, Taiwan

3. Department of Mechanical Engineering, University of Nevada, Reno, NV 89557

4. Department of Mechanical Engineering, Iowa State University, Ames, IA 50011

5. Department of Mechanical Engineering, University of Washington, Seattle, WA 98195

Abstract

Control can enable high-bandwidth nanopositioning needed to increase the operating speed of scanning probe microscopes (SPMs). High-speed SPMs can substantially impact the throughput of a wide range of emerging nanosciences and nanotechnologies. In particular, inversion-based control can find the feedforward input needed to account for the positioning dynamics and, thus, achieve the required precision and bandwidth. This article reviews inversion-based feedforward approaches used for high-speed SPMs such as optimal inversion that accounts for model uncertainty and inversion-based iterative control for repetitive applications. The article establishes connections to other existing methods such as zero-phase-error-tracking feedforward and robust feedforward. Additionally, the article reviews the use of feedforward in emerging applications such as SPM-based nanoscale combinatorial-science studies, image-based control for subnanometer-scale studies, and imaging of large soft biosamples with SPMs.

Publisher

ASME International

Subject

Computer Science Applications,Mechanical Engineering,Instrumentation,Information Systems,Control and Systems Engineering

Link

http://asmedigitalcollection.asme.org/dynamicsystems/article-pdf/doi/10.1115/1.4000158/5781756/061101_1.pdf

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