A GPU-Enabled Level-Set Method for Mask Optimization-Reference-Cited by-同舟云学术

A GPU-Enabled Level-Set Method for Mask Optimization

Published:2023-02 Issue:2 Volume:42 Page:594-605
ISSN:0278-0070
Container-title:IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
language:
Short-container-title:IEEE Trans. Comput.-Aided Des. Integr. Circuits Syst.

Author:

Yu Ziyang¹^ORCID,Chen Guojin¹^ORCID,Ma Yuzhe²^ORCID,Yu Bei¹^ORCID

Affiliation:

1. Department of Computer Science and Engineering, The Chinese University of Hong Kong, Hong Kong, SAR

2. Microelectronics Thrust, The Hong Kong University of Science and Technology (Guangzhou), Guangzhou, China

Funder

Research Grants Council of Hong Kong, SAR

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Computer Graphics and Computer-Aided Design,Software

Link

Reference36 articles.

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

2. Ultrafast Source Mask Optimization via Conditional Discrete Diffusion;IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems;2024-07

3. Model-based OPC Extension in OpenILT;2024 2nd International Symposium of Electronics Design Automation (ISEDA);2024-05-10

4. A Review of DNN and GPU in Optical Proximity Correction;2024 2nd International Symposium of Electronics Design Automation (ISEDA);2024-05-10