Author:
Polignano M.L.,Caputo D.,Giussani A.,Soncini V.,Di Toma G.
Cited by
7 articles.
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1. Device Performance as a Metrology Tool to Detect Metals in Silicon;physica status solidi (a);2019-08-08
2. Comparison of techniques for detecting metal contamination in silicon wafers;Spectrochimica Acta Part B: Atomic Spectroscopy;2018-11
3. Source of Metals in Si and Ge Crystal Growth and Processing;Metal Impurities in Silicon- and Germanium-Based Technologies;2018
4. Detection and reduction of tungsten contamination in ion implantation processes;physica status solidi (c);2016-07-11
5. Tungsten contamination in ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2016-06