The first low voltage, low noise differential silicon microphone, technology development and measurement results-Reference-Cited by-同舟云学术

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The first low voltage, low noise differential silicon microphone, technology development and measurement results

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Container-title:Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)
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Author:

Rombach P.,Mullenborn M.,Klein U.,Rasmussen K.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx5/7264/19601/00906474.pdf?arnumber=906474

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