A new method to increase MEMS microphone sensitivity using small circular diaphragm with fixed center-Reference-Cited by-同舟云学术

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A new method to increase MEMS microphone sensitivity using small circular diaphragm with fixed center

Published:2017-06-05 Issue:12 Volume:23 Page:5407-5413
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Nademi Nastaran,karamdel Javad,Ganji Bahram Azizollah

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/article/10.1007/s00542-017-3450-5/fulltext.html

Reference25 articles.

1. Bergqvist J (1993) Finite-element modelling, characterization of a silicon condenser microphone with a highly perforated backplate. Sens Actuators A 39:191–200

2. Bergqvist J, Rudolf F (1994) A Silicon condenser microphone using bond and etch-back technology. Sens Actuators A 45:115–124

3. Chao PCP (2013) A new hybrid fabrication process for a high sensitivity MEMS microphone. Microsyst Technol 19:1425–1431

4. Ganji BA, Majlis BY (2008) Design and fabrication of a new MEMS capacitive microphone using a perforated aluminum diaphragm. Sens Actuators 149:29–37

5. Ganji BA, Majlis BY (2009) High sensitivity and small size MEMS capacitive microphone using a novel slotted diaphragm. Microsyst Technol 15:1401–1406

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