MEMS microphones with narrow sensitivity distribution-Reference-Cited by-同舟云学术

MEMS microphones with narrow sensitivity distribution

Published:2016-08 Issue: Volume:247 Page:663-670
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Walser S.,Siegel C.,Winter M.,Feiertag G.,Loibl M.,Leidl A.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference24 articles.

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3. A MEMS condenser microphone for consumer applications;Weigold,2006

4. Design of a poly silicon MEMS microphone for high signal-to-noise ratio;Dehe;Proceedings of European Solid-State Device Research Conference,2013

5. Flip-chip MEMS microphone package with small front-volume and large back-Volume;Walser;Proceedings of European Microelectronics and Packaging Conference,2015

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