One-Megapixel Monocrystalline-Silicon Micromirror Array on CMOS Driving Electronics Manufactured With Very Large-Scale Heterogeneous Integration

Author:

Zimmer Fabian1,Lapisa Martin2,Bakke Thor3,Bring Martin1,Stemme Göran4,Niklaus Frank4

Affiliation:

1. Fraunhofer Institute for Photonic Microsystems (IPMS), Dresden, Germany

2. Microsystems Technology Laboratory, Royal Institute of Techology (KTH), Stockholm, Sweden

3. Department of Microsystems and Nanotechnology, Foundation for Scientific and Industrial Research (SINTEF), Oslo, Norway

4. Microsystems Technology (MST) Group, School of Electrical Engineering, Royal Institute of Techology (KTH), Stockholm, Sweden

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

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