One-Megapixel Monocrystalline-Silicon Micromirror Array on CMOS Driving Electronics Manufactured With Very Large-Scale Heterogeneous Integration-Reference-Cited by-同舟云学术

One-Megapixel Monocrystalline-Silicon Micromirror Array on CMOS Driving Electronics Manufactured With Very Large-Scale Heterogeneous Integration

Author:

Zimmer Fabian¹,Lapisa Martin²,Bakke Thor³,Bring Martin¹,Stemme Göran⁴,Niklaus Frank⁴

Affiliation:

1. Fraunhofer Institute for Photonic Microsystems (IPMS), Dresden, Germany

2. Microsystems Technology Laboratory, Royal Institute of Techology (KTH), Stockholm, Sweden

3. Department of Microsystems and Nanotechnology, Foundation for Scientific and Industrial Research (SINTEF), Oslo, Norway

4. Microsystems Technology (MST) Group, School of Electrical Engineering, Royal Institute of Techology (KTH), Stockholm, Sweden

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

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