Multileveled tunable silicon grating array bonded on large scale integration substrate by polymers
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Published:2021-01-26
Issue:01
Volume:1
Page:
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ISSN:2708-5260
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Container-title:Journal of Optical Microsystems
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language:
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Short-container-title:J. Optical Microsystems
Author:
Suzuki Tomohiro1,
Sawasdivorn Chernroj1,
Sasaki Takashi1,
Matsuura Hiroshi2,
Hane Kazuhiro1
Affiliation:
1. Tohoku Univ.
2. Tohoku Gakuin Univ.
Publisher
SPIE-Intl Soc Optical Eng