High-<inline-formula> <tex-math notation="LaTeX">$Q$ </tex-math></inline-formula> AlN-on-Silicon Resonators With Annexed Platforms for Portable Integrated VOC Sensing-Reference-Cited by-同舟云学术

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High- $Q$ AlN-on-Silicon Resonators With Annexed Platforms for Portable Integrated VOC Sensing

Published:2015-04 Issue:2 Volume:24 Page:503-509
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Fu Jenna L.,Ayazi Farrokh

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/7073672/06856136.pdf?arnumber=6856136

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Recent advances in micro- and bio- electromechanical system architectures for energy efficient chemiresistors;Microelectronic Engineering;2024-05

2. VOCs sensors based on bulk acoustic resonators: a comprehensive review;Microsystem Technologies;2024-04-14

3. Resonant Inertial Mass Sensing for VOCs—CMOS-Compatible SoC Integration Advantages and Challenges: A Review;IEEE Sensors Journal;2023-01-01

4. CMOS-Integrated Aluminum Nitride MEMS: A Review;Journal of Microelectromechanical Systems;2022-08

5. Towards Portable MEMS Oscillators for Sensing Nanoparticles;Sensors;2022-07-22

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