CMOS-Integrated Aluminum Nitride MEMS: A Review-Reference-Cited by-同舟云学术

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CMOS-Integrated Aluminum Nitride MEMS: A Review

Published:2022-08 Issue:4 Volume:31 Page:500-523
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Pinto Rui M. R.¹^ORCID,Gund Ved²^ORCID,Dias Rosana Alves¹^ORCID,Nagaraja K. K.³^ORCID,Vinayakumar K. B.¹^ORCID

Affiliation:

1. International Iberian Nanotechnology Laboratory, Integrated Micro and Nanotechnologies (IMiNa), Braga, Portugal

2. Department of Electrical and Computer Engineering, Cornell University, Ithaca, NY, USA

3. Department of Physics, Manipal Institute of Technology, Manipal Academy of Higher Education, Manipal, India

Funder

PO Norte Agency

Department of Science and Technology, Government of India

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/9847109/09774849.pdf?arnumber=9774849

Reference255 articles.

1. AlN based piezoelectric micromirror

2. Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride

3. AlN film based piezoelectric large-aperture MEMS scanning micromirror integrated with angle sensors

4. Piezoelectric Scanning Micromirror With Built-In Sensors Based on Thin Film Aluminum Nitride

5. 2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride

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