Resonant Inertial Mass Sensing for VOCs—CMOS-Compatible SoC Integration Advantages and Challenges: A Review
Author:
Affiliation:
1. Department of Engineering, Electronic Systems Group (GSE-UIB), University of the Balearic Islands, Palma, Spain
Funder
Spanish Ministry of Economy and Competitiveness
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/7361/10003029/09967939.pdf?arnumber=9967939
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1. Design, Fabrication, and Characterization of Scandium Aluminum Nitride-Based Piezoelectric Micromachined Ultrasonic Transducers
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