Highly improved quality factor of the film bulk acoustic wave resonator by introducing a high quality ZnO buffer layer
-
Published:2024-07
Issue:
Volume:660
Page:160025
-
ISSN:0169-4332
-
Container-title:Applied Surface Science
-
language:en
-
Short-container-title:Applied Surface Science
Author:
Zhao Lishuai,
Ouyang PeidongORCID,
Yi Xinyan,
Li GuoqiangORCID