Statistics of breakdown field and time-dependent dielectric breakdown in contact-to-poly modules
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Publisher
IEEE
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http://xplorestaging.ieee.org/ielx5/5776767/5784429/05784468.pdf?arnumber=5784468
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Statistical evaluation method for lifetime distribution in field-accelerated time-dependent dielectric breakdown using two-step probability plot and multilink test scheme;Japanese Journal of Applied Physics;2018-05-21
2. Two-step probability plot for parameter estimation of lifetime distribution affected by defect clustering in time-dependent dielectric breakdown;Japanese Journal of Applied Physics;2017-06-21
3. Simulation study for lifetime distribution of middle-of-line time-dependent dielectric breakdown affected by global and local spacing variations;Japanese Journal of Applied Physics;2016-05-17
4. Statistical characteristics of lifetime distribution based on defect clustering for time-dependent dielectric breakdown in middle- and back-end-of-line;Japanese Journal of Applied Physics;2015-04-17
5. Electrical Breakdown in Advanced Interconnect Dielectrics;Advanced Interconnects for ULSI Technology;2012-02-17
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